Process Technology Launches Compact In-line Chemical Heater

Process Technology Launches Compact In-line Chemical Heater


in-line chemical heather

ChemHeat by Process Technology


Process Technology has launched its ChemHeat In-line Chemical Heater, a  compact unit with all fluoropolymer wetted surfaces for ultra-high-purity (UHP) applications, including semiconductor filtration, sterilization and cleaning.

Unique fluid path design and patented purge technology eliminates high-temperature fluid permeation and detects leaks extending product life (MTBF). A low internal volume results in faster heat-up, precise and stable heating performance, lower surface temperatures, and reduced chemistry costs.

Highly adaptable, the class 100 cleanroom assembled ChemHeat easily integrates into existing manufacturing systems and new tools with its’ small overall footprint and is suitable for use with non-flammable wet chemistries, including water, acids, bases and solvents.

Additional product specifications:

  • Temperature: up to 120°C (248°F).
  • Pressure: up to 689 kPa (100 PSI).
  • Wattages: 2 – 6kW.
  • Voltages: 120-480V in single or three-phase.
  • Certifications: CE, UL499, Semi S2